Trichlorosilane (TCS) SiCl3H
| Gas Data | Molecular Weight | 135.45 | |
|---|---|---|---|
| Vapor Pressure(psia 21℃) | - | ||
| Specific Gravity(Air=1) | - | ||
| Specific Volume |
CF/lb | - | |
| ㎥/kg | - | ||
| Boiling point(℃) | 31.9 | ||
| Purity | 4N | ||
| Cylinder Data | Size | 211.5 L | |
| Grade | XF | ||
| Meterial | - | ||
| Connection | Outlet | 1/2 VCR | |
| Material | - | ||
| Contents (kgs) | 250 | ||
| Pressure | psig @ 21.1℃ | - | |