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Pure Gas

Various gases are used in the manufacturing process of semiconductor. Namely bulk gases and electronics specialty gases. Bulk gases include nitrogen, oxygen, argon and hydrogen; electronics specialty gases include material gases such as Silane, doping gases as Phosphine, and cleaning gases such as ClF3, C3F8 and NF3

  Electronics specialty gases, such as WF
6, SiH4, PH3, AsH3, BCl3, and NF3 are being used as film deposition, doping, diffusion and cleaning in semiconductor manufacturing process.

Product List

Product list
Arsine AsH3 Diborane B2H6 Boron Trichloride BCl3 Boron Fluoride BF3
Hexafluorobenzene C2F6 Trifluromethane CHF3 Phosphine PH3 Tungsten Hexafluroride WF6
Chlorine trifluoride ClF3 Tetrafluoromethane CF4 Hydrogen Bromide HBr Carbon Dioxide CO2
Hydrogen H2 Oxygen O2 Hydrogen Chloride HCl Nitrogen N2
Chlorine Cl2 Nitrogen Trifluoride NF3 Nitrous Oxide N2O Ammonia NH3
Difluoromethane CH2F2 Hydrogen Selenide H2Se Hydrogen Sulfide H2S