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Pure Gas
Various gases are used in the manufacturing process of semiconductor. Namely bulk gases and electronics specialty gases. Bulk gases include nitrogen, oxygen, argon and hydrogen; electronics specialty gases include material gases such as Silane, doping gases as Phosphine, and cleaning gases such as ClF3, C3F8 and NF3.
Electronics specialty gases, such as WF6, SiH4, PH3, AsH3, BCl3, and NF3 are being used as film deposition, doping, diffusion and cleaning in semiconductor manufacturing process.
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